VERFAHREN ZUM BETREIBEN EINES PIEZOAKTORS,申请号DE20055007897T-传众专利搜索

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发明名称	VERFAHREN ZUM BETREIBEN EINES PIEZOAKTORS
摘要
申请公布号	DE502005007897(D1)	申请公布日期	2009.09.24
申请号	DE20055007897T	申请日期	2005.06.16
申请人	PHYSIK INSTRUMENTE (PI) GMBH & CO. KG	发明人	ZHAO XIANBIN, OSKAR DR.
分类号	H01L41/04;G05B17/02	主分类号	H01L41/04
代理机构		代理人
主权项
地址

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