摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a detoxifier for carbon monoxide capable of detoxifying carbon monoxide efficiently in an inactive atmosphere. <P>SOLUTION: The detoxifier is used to detoxifying the harmful carbon monoxide in exhaust gases discharged from, e.g. semiconductor manufacturing processes and consists of a manganese oxide, the main ingredient, loaded with one or more selected from among simple metals and their compounds of gold, platinum, silver and rhodium. As the manganese oxide, manganese (III) oxide and manganese oxide (IV) are preferably used singly or a mixture thereof. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |