COORDINATE MEASURING MACHINE USING REFERENCING PANEL

摘要

The present invention relates to a coordinate measuring machine using a referencing panel capable of correcting mechanical errors for an object on a real time basis and precisely measuring surface coordinates of the object. The coordinate measuring machine includes a measuring unit arranged on the object and secured to the axis of an X-axis stage such that the measuring unit is movable in the horizontal direction, and a referencing panel fixed on the measuring unit. The measuring unit performs a precise measuring process by measuring the distance between the measuring unit and the referencing panel and the distance between the measuring unit and the object on a real time basis and correcting mechanical errors in the X-axis stage.