| 摘要 |
<p>The invention relates to a device for generating a radiofrequency plasma, which comprises a supply module (20) applying, on an output interface, an excitation signal (U) at a setpoint frequency (Fc), adapted for generating a spark (40) at the output of a plasma-generation resonator (30) connected to the output interface of the power module, and a control module (10) supplying the setpoint frequency to the power module upon a command for generating the radiofrequency plasma, wherein said device is characterised in that the control module includes a means for determining an optimal excitation frequency, capable of adapting the setpoint frequency (Fc) to the resonance conditions of the device after formation of the spark.</p> |
