| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem wherein the controlling performance of a stage formed of thermal spray ceramic falls, since air leakage occurs due to pores or microcracks of a ceramic layer, and thus the stiffness of the stage cannot be ensured. <P>SOLUTION: A positioning equipment has a guide, having a guidance plane subjected to ceramic spraying and the stage, and the equipment is so designed that the stage is moved along the guidance plane, while a gap between the guidance, and the stage is controlled by the pressure due to air and attraction by a preloaded magnet. The guidance plane is subjected to sealing and then polished. <P>COPYRIGHT: (C)2009,JPO&INPIT |
