| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration switch having excellent impact resistance. <P>SOLUTION: This acceleration switch 20 includes a weight part 1, a frame 2, and a flexible film 3a connecting the weight part 1 to the inside of an opening of the frame 2 and suspending the frame 2. The weight part 1 and the opening of the frame 2 are formed approximately circularly in a plan view, and the flexible film 3a connects the weight part 1 to the frame 2 at an approximately circular bonding part. An upper movable electrode 5 is formed on the upper surface of the weight part 1, and a lower movable electrode 8a is formed on the opposite surface to the upper movable electrode 5. The upper movable electrode 5 is conducted with the lower movable electrode 8a. Further, the acceleration switch 20 has an upper lid 7a comprising a conductive material on a position facing to the upper movable electrode 5 over the weight part 1. The acceleration switch 20 also includes a substrate 10 under the weight part 1, and is provided with a lower fixed electrode 9 on a position facing to the lower movable electrode 8a, on the upper surface of the substrate 10. <P>COPYRIGHT: (C)2009,JPO&INPIT |
