ELECTRONIC COMPONENT INSPECTION METHOD AND DEVICE USED FOR IT

摘要

PROBLEM TO BE SOLVED: To provide an outstanding inspection method and a device used for it capable of rapidly and accurately inspecting fine parts of electronic components. SOLUTION: The method includes: placing an electronic component on a stage; moving to position an imaging means 40 combining a differential interference microscope 44 and a CCD camera 45 by an X-direction movement means 46; imaging continuously two or more images while moving back or forth an objective lens of the differential interference microscope 44 by a Z-direction adjustment means 47 and imaging after calculating an optimum focusing length from the image data and bringing into focus as for an electronic component inspected first time; imaging the electronic component at next time or thereafter after automatically bringing into focus in accordance with a predicted optimum focusing length directed from the optimum focusing length memorized at previous time or before; and inspecting goodness/badness of the imaged site from the resulting data. COPYRIGHT: (C)2009,JPO&INPIT