WAVELENGTH SPECTROSCOPY DEVICE WITH INTEGRATED FILTERS

摘要

The invention relates to a wavelength spectroscopy device that comprises, on a substrate SUB, a filtering module comprising two mirrors MIR1, MIR2 separated by a spacing membrane SP. The filtering module includes a plurality of interference filters FP1, FP2, FP3, the thickness of the spacing membrane SP being constant for a given filter and varying from one filter to the other.