发明名称 GAS-DISSOLVED WATER SUPPLY SYSTEM
摘要 <p>Provided is a gas-dissolved water supply system which can produce gas-dissolved water of high density efficiently and which can circulate and supply the water to a use point. A reserving bath (1) is fed with waste water (or rinsing waste water), after the object to be rinsed was rinsed with water containing a dissolved gas (oxygen), via a pipeline (15), and reserves that waste water, and the supply water is fed via a supply water pipeline (1a). The water of the reserving bath (1) is fed to a purifying device (4) through a forced feed pump (2) and a heat exchanger (3) for keeping the water temperature constant. The water, which is cleared of a foreign substance by the purifying device (4), is fed through a flow meter (5) to a degassing device (6). After this, the gas is dissolved by a gas dissolving device (7), and the water is fed, after chemical was added thereto, to a use point.</p>
申请公布号 WO2009113682(A1) 申请公布日期 2009.09.17
申请号 WO2009JP54933 申请日期 2009.03.13
申请人 KURITA WATER INDUSTRIES LTD.;TOKOSHIMA, HIROHITO;MORITA, HIROSHI;KAMETANI, SHIGEJI 发明人 TOKOSHIMA, HIROHITO;MORITA, HIROSHI;KAMETANI, SHIGEJI
分类号 B08B3/08;H01L21/304 主分类号 B08B3/08
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