| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a base material position controller using simple units. <P>SOLUTION: The base material position controller includes a position detecting means, a position feedback means, a vacuum control means, and a sucking/holding stage. The base material is sucked and held by vacuum onto the sucking/holding stage. The position detecting means detects position information of a given spot of the base material on the sucking/holding stage to send the position information to the position feedback means. The position feedback means converts the position information into a lateral position shift quantity and further converts the lateral position shift quantity into a degree of vacuum to send the degree of vacuum to the vacuum control means. The vacuum control means then adjusts a degree of vacuum to be given to the sucking/holding stage in correspondence to the above degree of vacuum to laterally adjust the position of the base material on the sucking/holding stage. <P>COPYRIGHT: (C)2009,JPO&INPIT |
