SOFT X-RAY GENERATOR, AND STATIC ELIMINATOR USING IT

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive and high-performance soft X-ray generator capable of generating a large-output soft X-rays in a stable state and in a large-area form with a small electric field, and irradiating an irradiation object with the generated X-ryas by controlling the irradiation direction of the X-rays to be efficiently concentrated. SOLUTION: This soft X-ray generator is characterized in that, in a sealable cylindrical vacuum housing, a positive electrode having a curved surface and formed of an X-ray emitting substance is arranged along the longitudinal direction of the inside wall surface of the housing; a cold cathode formed of an electrode material with needle-like bodies compactly formed on a base material surface is arranged at a distance from and in parallel to the positive electrode; and X-rays generated from the positive electrode is emitted to the cold cathode side. COPYRIGHT: (C)2009,JPO&INPIT