| 摘要 |
PROBLEM TO BE SOLVED: To provide a door opening/closing device of simple construction and suitable for a large-sized vacuum apparatus capable of reducing the load in the event of earthquake and pressing a door to a vacuum vessel with a weak force. SOLUTION: An opening 11a of a cylindrical vacuum vessel 11 arranged with its axis directed in the horizontal direction is opened and closed by the door 12 moving in the horizontal direction perpendicular to the axis. The door opening and closing device is fitted with a guide rail 17 directed perpendicular to the axis installed on the floor surface in front of the opening 11a, a truck 13a moving under the guidance of the guide rail 17, a gate-form frame 14 installed on the truck 13a, and a door hanging means 15 installed on a beam 14b in the upper part of the gate-form frame. COPYRIGHT: (C)2009,JPO&INPIT
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