OPTICAL IMPRINT METHOD, MOLD DUPLICATING METHOD, AND MOLD DUPLICATE

摘要

Provided is an optical imprint method and so on, which keeps an expensive mold out of dirt and which has high productivity. This optical imprint method comprises applying a rework type optical crosslinking/curing resin to a substrate (1) thereby to form a resin layer (2), pushing a mold (3) to the resin layer (2), then emitting a first wavelength light, and peeling the mold (3) from the resin layer (2) so that a pattern is transferred to the resin layer (2). The rework type crosslinking/curing resin is crosslinked/cured by irradiating the resin with the first wavelength light, and is solubilized in a solvent by irradiating or heating the same with a second wavelength light having a shorter wavelength than the first wavelength. Even if a groove in the mold (3) is closed with the crosslinked/cured resin, therefore, the crosslinked/cured resin can be again solubilized by irradiating the mold (3) with the second wavelength light, so that the resin can be easily removed.