ADJUSTMENT METHOD OF NORMAL LINE DIRECTION OF BASE PLATE

摘要

In an adjustment method of a normal line direction of a base plate, a plurality of points to be irradiated by a pulse laser are provided in a predetermined area to be irradiated by the pulse laser. A central position and a range of the predetermined area are fixed in accordance with a direction to which the normal line direction is changed, and the amount of change in direction is increased/decreased by increasing/decreasing the number of points to be irradiated by the laser pulse, wherein distribution density of the points to be irradiated by the pulse laser becomes higher when the number of the points to be irradiated is increased, and becomes lower when the number of the points to be irradiated is decreased. An oscillating condition of the pulse laser is substantially fixed regardless of the direction to which the normal line direction is caused to change and the amount of change in direction.