METHOD FOR DETERMINATION OF RESONANT FREQUENCIES OF A ROTOR USING MAGNETIC BEARINGS

摘要

The invention relates to a method for determination of resonant frequencies of a rotor using magnetic bearings, in particular of a rotor of a turbomolecular vacuum pump. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations.