| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device which is made compact and performs maskless exposure through stable operation and which perform high-precision exposure on a body to be exposed which has a level difference on a surface to be exposed through maskless exposure, and to provide an exposure method. <P>SOLUTION: The exposure device 10 includes a light source 12, an MEMS optical scanner which repeatedly tilts a mirror M, and an exposure optical system which exposes the body to be exposed to light from the light source through the mirror, wherein the exposure device irradiates the body to be exposed with the light from the light source by making a scan through the mirror tilted by the optical scanner, thereby exposing the body to be exposed. An irradiation position on the body to be exposed in a vertical direction to the surface to be exposed is adjusted by a lens barrel actuator. <P>COPYRIGHT: (C)2009,JPO&INPIT |
