摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method can inspect open defects caused by aging and suitably determining its quality level, in an organic EL element having an upper electrode with film thickness of 135 nm or more. SOLUTION: In the inspection method for the organic EL element wherein a lower electrode, an organic film including a light-emitting layer, and the upper electrode with film thickness of 135 nm or more are laminated in order on a substrate, voltage V is applied between both electrodes wherein a negative electrode side is set up to be a plus electrode and a positive electrode side is set up to be a minus electrode between the upper and lower electrodes, and leak current flowing between both electrodes is measured for a long period while making the defect section existed on the organic film evident. Thus, instantaneous current accompanied by the open defect can be detected, and it is determined on the basis of the measured leak current that what the instantaneous current is detected is a poor quality product and what the instantaneous current is not detected is a good quality product. COPYRIGHT: (C)2009,JPO&INPIT
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