ELECTRON BEAM DRAWING METHOD, ELECTRON BEAM DRAWING DEVICE, METHOD OF MANUFACTURING IMPRINT MOLD AND METHOD OF MANUFACTURING MAGNETIC DISK MEDIUM

摘要

PROBLEM TO BE SOLVED: To shorten drawing time without reducing accuracy of pattern drawing when a hard disk pattern is drawn. SOLUTION: When drawings of a large number of concentric tracks are sequentially performed, as a track feeding method for performing drawing of an adjacent drawing track after one drawing track is drawn, a deflecting means 21 performs a track feed based on output of a high speed deflection amplifier 53 in the range in which deflection is made possible by output of the high speed deflection amplifier 53 together with a track feed by the deflecting means 21 based on output of a low speed deflection amplifier 54 and a track feed by linear movement of a rotational stage 41 in a radial direction by a stage linearly moving means 48. COPYRIGHT: (C)2009,JPO&INPIT