| 摘要 |
A digital microphone comprises a DeltaSigma modulator. The DeltaSigma modulator has a resonator including a membrane which vibrates by receiving a sound wave and a wiring pattern disposed opposite to the membrane, an oscillator, including the resonator, for outputting an FM signal according to the vibration of the membrane, and a one-bit quantizer for outputting a one-bit quantized signal by sampling the FM signal with a high-frequency clock.
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