FARADAY CUP ARRAY INTEGRATED WITH A READOUT IC AND METHOD FOR MANUFACTURE THEREOF

摘要

A detector array and method for making the detector array. The array includes a substrate including a plurality of trenches formed therein, and includes a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection. The array includes a plurality of readout circuits disposed on a side of the substrate opposite openings to the collectors. The readout circuits are configured to read charge collection signals from respective ones of the plurality of collectors. The method forms in a substrate a plurality of trenches across a surface of the substrate, forms in the plurality of trenches a plurality of collectors, forms a plurality of readout connections on a side of the substrate opposite openings to the collectors with the readout connections being configured to collect signals from respective ones of the plurality of collectors, and connects respective ones of the plurality of readout connections to respective ones of the plurality of the collectors.