发明名称 END EFFECTOR
摘要 <p>An apparatus for transporting a substrate is provided. The apparatus includes an upper portion housing an electric motor, the electric motor having a drive shaft. A motor housing encloses the electric motor. A pivot bracket having a first end and a second end, where the first end of the pivot bracket is coupled to the drive shaft. The apparatus includes a lower portion having a top surface affixed to the second end of the pivot bracket. The lower portion includes a plurality of paddle assemblies each having support extensions extending though a bearing assembly of the lower portion. Each of the paddle assemblies has an independent drive assembly disposed between corresponding support extensions, wherein the lower portion translates between a vertical and horizontal orientation by pivoting around an axis of the driveshaft.</p>
申请公布号 WO2009114780(A1) 申请公布日期 2009.09.17
申请号 WO2009US37120 申请日期 2009.03.13
申请人 XYRATEX INTERNATIONAL;JAMIESON, JON;ENG, FRANCO;SUNDARARAJAN, SRINIVASAN;KREGER, TROY;BELENKY, SASHA;KOJANGIAN, JANRY 发明人 JAMIESON, JON;ENG, FRANCO;SUNDARARAJAN, SRINIVASAN;KREGER, TROY;BELENKY, SASHA;KOJANGIAN, JANRY
分类号 H01L21/68;H01L21/677 主分类号 H01L21/68
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