发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and method for manufacturing the same are provided to prevent the electric signal fault caused by a residue by preventing the residue generated in a cutting process. A lower structure and the first interlayer insulating film(200) are formed in the semiconductor substrate. The fuse(210) is formed on the first interlayer dielectric. The air layer is formed in the top and lower part of fuse. The second intermetal dielectric(220) is formed on the air layer of the fuse. The hole(225) is formed in the second inter metal dielectric between the fuses which is adjacent to fuse. The fuse is separated from the upper part of the first interlayer dielectric in 100 ~ 1000 nm.
申请公布号 KR20090098196(A) 申请公布日期 2009.09.17
申请号 KR20080023427 申请日期 2008.03.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, JIN WON
分类号 H01L23/62 主分类号 H01L23/62
代理机构 代理人
主权项
地址