| 摘要 |
PROBLEM TO BE SOLVED: To obtain a manufacturing method of a micro pattern capable of precisely and easily forming a micro pattern on a substrate. SOLUTION: The manufacturing method includes step of preparing a substrate 6 on a surface 6a, and a film-shaped patterning material 1A having a micro-pattern shape reverse to the micro pattern, a step of laminating the patterning material 1A on the upper surface of the substrate 6, a step of applying a material 7 patterned to the upper surface of the substrate 6 on which the material 1A is laminated, and a step of removing the material 1A from the upper surface 6a of the substrate 6, patterning the material 7 into the micro pattern reverse to the material 1A, and thus forming the micro pattern 7A formed of the material 7. COPYRIGHT: (C)2009,JPO&INPIT
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