| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel actuator which does not use a piezoelectric body, and also to provide its manufacturing method. SOLUTION: The actuator 100 includes a deformable substrate 10, a magnetic body 20 provided above the substrate 10 and having an opening part 22, and a coil 30 provided above the substrate 10 and disposed to surround the magnetic body 20. COPYRIGHT: (C)2009,JPO&INPIT
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