| 摘要 |
PROBLEM TO BE SOLVED: To load a large load to a joining surface uniformly in a cold joining device for manufacturing a large quantity of products using cold joining. SOLUTION: The cold joining device is provided with a first drive device for driving a first stage for supporting a first sample base which supports a first substrate in a first direction, a second drive device for driving a second sample base 46 in a second direction, a carriage support base 45 for supporting the second sample base 46 in the first direction when a second substrate 43 and the first substrate are brought into pressure contact with each other, mechanical lock mechanisms 57, 58, 59 for mechanically fixing a cartridge 55 for fixing the second substrate 43 on the second sample base 46. Such a cold joining device reduces a load applied to the second drive device when the first substrate and the second substrate 43 are brough into pressure contact with each other, and applies a larger load exceeding the limit load of the second drive device to the first substrate and the second substrate 43. In addition the second substrate 43 is attachably/detachably supported on the second sample base 46 without applying an electromagnetic force to the second substrate 43. Accordingly, the cold joining device loads the large load to the substrate to which the electromagnetic force is not applied. COPYRIGHT: (C)2009,JPO&INPIT |
