| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide that is inexpensive with an easy manufacturing process, has a large refractive index difference between a core part and a clad part, and has a small bend radius suitable for a small integrated circuit, and to provide a method of manufacturing the same. <P>SOLUTION: The method of manufacturing the optical waveguide includes the following steps (A) and (B). In the step (A), a coating film is formed on a lower clad part by using a coating liquid that contains an oxide precursor containing titanium atoms and silicon atoms, and in a step (B), the coating film is irradiated with radiation, and subsequently heat treated to form a core/clad layer having a core area having a high refractive index irradiated with the radiation and a clad area not irradiated with radiation and having a lower refractive index than the core area. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
