| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To use a high-purity alumina substrate having high cleanliness as a dielectric in order to avoid lowering of ozone concentration which becomes a problem when high-purity oxygen is used as raw material gas. <P>SOLUTION: Catalytic material powder 14a for preventing ozone concentration from lowering is fixed on a surface of an alumina substrate as a dielectric 10 with a baking fixing agent 14b. The baking fixing agent 14b is glass which becomes paste capable of kneading the catalytic material powder and sticking it to the dielectric surface, and is hardened upon firing to fix the catalytic material on the dielectric surface and to exhibit ozone resistance and sputtering resistance under ozone generation in a discharge gap, and the baking fixing agent 14b enables to form a catalytic material-rich and stable functional film 14 on the surface of the dielectric 10. The catalytic material powder 14a in the functional film 14 is concentrated in a surface layer material in the functional film 14 and forms a functional material layer in contact with a discharge gap 30. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
