发明名称 Semiconductor device capable of suppressing short channel effect and method of fabricating the same
摘要 A semiconductor device includes a semiconductor substrate including at least one memory channel region and at least one memory source/drain region, the memory channel region and the memory source/drain region being arranged alternately, and at least one word line on the memory channel region, wherein the memory source/drain region has a higher net impurity concentration than the memory channel region.
申请公布号 US2009230451(A1) 申请公布日期 2009.09.17
申请号 US20090382385 申请日期 2009.03.16
申请人 LEE CHANG-HYUN;CHOI JUNG-DAL 发明人 LEE CHANG-HYUN;CHOI JUNG-DAL
分类号 H01L29/788;H01L29/66;H01L29/792 主分类号 H01L29/788
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