| 摘要 |
<p>Provided is a technique capable of inspecting an organic EL residue on the surface of an object to be inspected. An inspection area (20) of the surface of an object to be inspected (15) is irradiated with ultraviolet light (31) while being observed through a polarizing filter (13). Reflected ultraviolet light (32) reflected by the inspection area (20) is shielded by the polarizing filter (13), and the light is not observed. However, when an organic EL residue (24) exists in the inspection area (20), the organic EL residue (24) emits light and visible light (33) is transmitted through the polarizing filter (13), so that the light is observed through the polarizing filter (13) and the existence of the organic EL residue (24) can be seen.</p> |
