| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to remove a printed substrate smoothly even if there is an interference object on the periphery. <P>SOLUTION: A substrate support device is equipped with: a base plate 110; a pair of side wall bodies 120 so disposed as to face the base plate 110; rail sections 130 which are provided on the inner wall side of each side wall body 120 and support the edge of the bottom face of a substrate P from both sides in the substrate width direction; guide pieces 150 which are disposed at least above the installation positions of the rail sections 130 on the side wall bodies 120 and can move horizontally between the supporting position at which they face the rail sections 130 vertically and the opening position at which they open the upper side of the rail sections 130 by moving outward in the Y direction from the supporting position; a locking device 170 for locking the guide pieces 150 at the supporting position; and a backup device 200 which supports the substrate P by holding it vertically between itself and the guide pieces 150 locked at the supporting position while lifting the substrate P with its bottom face supported by the rail sections 130. <P>COPYRIGHT: (C)2009,JPO&INPIT |
