| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for determining causes of particle production, which enables even a person who has little knowledge about the causes of production of particles to accurately determine a cause of production of particles. SOLUTION: The system 43 for determining the causes of particle production, which determines the cause of production of particles, includes a client PC 47 and a host server 48, wherein the host server 48 has a memory which stores programs for calculating methods of calculating accuracies associated with causes of production of a plurality of particles, and a CPU which calculates the accuracies as to the respective causes of production of particles from a particle map, and materials, shapes and sizes of the respective particles based on the stored programs, and the client PC 47 displays the accuracies calculated as to the causes of production of respective particles on a display 51. COPYRIGHT: (C)2009,JPO&INPIT
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