| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope can accurately measure a sample potential or a sample height, while preventing damages and the like by a charged-particle radiation. SOLUTION: In order to solve the subject matter, the scanning electron microscope is provided to measure the sample height and the sample potential using measured results obtained at the applied state of a voltage to a sample, so as not to get the charged-particle radiation of an electronic beam to the sample when it is radiated to the sample. Further as one embodiment, the scanning electron microscope includes a function to correct conditions and the like in an apparatus such as magnification, focus, measuring coordinate and the like varied in accordance with a sample electrification, based on the measured sample height and the sample electrification. COPYRIGHT: (C)2009,JPO&INPIT
|
