| 摘要 |
PROBLEM TO BE SOLVED: To provide an oscillating body device, capable of using various combinations of bending deformation modes of a plurality of bending beams in a beam structure for rockably supporting a movable body for various purposes such as scanning line interval correction or the like. SOLUTION: The oscillating body device includes a movable body 101, a beam structure which supports the movable body to a support frame 105 so as to be rockable around two oscillating axes, and at least one of drive means and detection means. The beam structure includes a torsion-deformable torsion beam 102 and a plurality of bending-deformable bending beams 103. One end of the torsion beam 102 is connected to the movable body, the other end thereof is connected to one end of each bending beam through a connection part 102, and the other end of each bending beam 103 is connected to the support frame 105. The drive means 106 or 113 selects a combination of bending deformation modes of the bending beams according to a drive signal, and selects at least one oscillation axis to cause angular displacement of the movable body around the oscillation axis. The detection means receives an effect according to the combination of bending deformation modes of the bending beams and detects the angular displacement of the movable body around the at least one oscillation axis. COPYRIGHT: (C)2009,JPO&INPIT
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