| 摘要 |
PROBLEM TO BE SOLVED: To provide a microcontact printing method and a microcontact printing method able to adhere closely a stamp and a transferred substrate while keeping the degree of parallel of a stamp and a transferred substrate at a low cost. SOLUTION: A sample substrate 3 is fixed to the upper side of a substrate stand 5. A stamper 31 arranged above the substrate stand 5 has a structure in which a stamp 2 supports a stamp holder 1 cemented below from below so as to be into or out of contact by a leg 7c. Additionally, a stamper 31 is moved below, a stamp 2 and the stamp holder 1 are made to lay on the sample substrate 3. The stamp holder 1 and the leg 7c are separated. The stamp 2 is pressed to the sample substrate 3 by a tare of the stamp 2 and the stamp holder 1, and a coating film material adhered to the stamp 2 is transferred to a sample substrate 3. COPYRIGHT: (C)2009,JPO&INPIT
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