PLANAR TYPE FREQUENCY SHIFT PROBE FOR MEASURING PLASMA ELECTRON DENSITIES AND METHOD AND APPARATUS FOR MEASURING PLASMA ELECTRON DENSITIES

摘要

A planar type frequency shift probe that utilizes resonance of electromagnetic waves and includes a main body with a conductor plate and a coaxial cable. The main body includes a long narrow space, which has predetermined width and length and has an opening on the periphery of the main body, as well as the first surface part and the second surface part. The surface conductor of the coaxial cable is connected to the first surface part while the core conductor of the coaxial cable is connected to the second surface part via a lead wire.