发明名称 |
Manufacturing method of electro line for liquid crystal display device |
摘要 |
A manufacturing method of an electro line for a liquid crystal display device includes depositing a barrier layer made of a conducting material on a substrate, depositing a copper layer (Cu) on the barrier layer, wet-etching the Cu layer using a first etchant, and dry-etching the barrier layer using a second etchant using the wet-etched Cu layer as an etch mask.
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申请公布号 |
US2009233388(A1) |
申请公布日期 |
2009.09.17 |
申请号 |
US20090382422 |
申请日期 |
2009.03.16 |
申请人 |
KWON OH-NAM;LEE KYOUNG-MOOK;CHO HEUNG-LYUL;NAM SEUNG-HEE;JO CYOO-CHUL |
发明人 |
KWON OH-NAM;LEE KYOUNG-MOOK;CHO HEUNG-LYUL;NAM SEUNG-HEE;JO CYOO-CHUL |
分类号 |
H01L33/00;H01L21/336;H01L29/45;H01L29/49 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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