SINGLE CHAMBER VACUUM HEAT TREATING FURNACE AND METHOD OF PREVENTING OXIDATION OF ARTICLE TO BE TREATED IN SINGLE CHAMBER VACUUM HEAT TREATING FURNACE

摘要

A single chamber vacuum treating furnace (A) comprises a furnace body (1) in which a water-cooling jacket (15) is formed on a furnace wall (11) and a treatment space (S) for an article to be treated (W) is formed by the furnace wall (11), a heating device (2) for heating the article to be treated (W) installed in the furnace body (1), a cooling gas supply device (3) for supplying a cooling gas into the treatment space (S), a first refrigerant circulation system for cooling the article to be treated (W), through the cooling gas, by a heat exchanger (52) installed in the treatment space (S), a depressurizing device (4) for depressurizing the inside of the treatment space, and a secondary refrigerant circulation system for supplying a refrigerant (C) into the water-cooling jacket (15). The second refrigerant circulation system comprises a refrigerant heating part (65) for heating the refrigerant (C). With the configuration, an excellent article to be treated can be provided by effectively preventing the inner surface of the furnace body (1) from being condensed in a short time for improving the working efficiency.