| 摘要 |
PROBLEM TO BE SOLVED: To provide a reactor easily and economically expandable to increase a throughput without substantially receiving influence of undesirable effects of heat convection. SOLUTION: A chemical vapor deposition reactor is equipped with a plurality of chambers (951, 952, 953) and at least one of a common reaction gas supply system (960) and a common gas exhausting system (970). COPYRIGHT: (C)2009,JPO&INPIT |
