X-RAY GENERATOR, X-RAY ANALYSIS DEVICE, X-RAY TRANSMISSION IMAGE MEASUREMENT DEVICE, AND X-RAY INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray generator for stably emitting a characteristic X-ray of a minute spot around 10-20μmϕat a low angle without being influenced by variation of the position of an electron beam around severalμm. SOLUTION: This X-ray generator includes: a tube body structured to allow the inside to be brought into a vacuum state; an electron source generating an electron beam in the tube body; and target members arranged in the tube body for generating an X-ray by being irradiated with the electron beam emitted from the electron source. The X-ray generator is characteristically structured such that the target members 3a and 3b are formed by embedding a plurality of repeated minute-width stripe-like metal thin films 32 in base materials 31 and 31a, and a specific stripe-like metal thin films is irradiated with the electron beam, whereby a characteristic X-ray is emitted at a low angle from the specific stripe-like metal thin film to the outside through an X-ray window 12. COPYRIGHT: (C)2009,JPO&INPIT