| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface evaluation method of an optical disk, which is not influenced by light reflected from a rear face of a substrate, and to provide a surface evaluating device which materializes the surface evaluation method. SOLUTION: An interferometer 100 is set up in such a way that an optical axis of measure light is tilted at a tilt angle ofΦ<SB>0</SB>toward a surface of an optical disk substrate 150 which is an object to be measured. Whereas, diffracted light DF is emitted at an angle ofΦ<SB>1</SB>with respect to the virtual normal VL extending from the surface of the substrate 150. When the tilt angle of the interferometer 100 is set so as to satisfy equationΦ<SB>0</SB>=Φ<SB>1</SB>, the diffracted light DF is made incident on the interferometer 100. Projections and depressions of the surface is evaluated by observing interference fringes produced by the interference of diffracted light DF and reference light RF. COPYRIGHT: (C)2009,JPO&INPIT
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