VERFAHREN ZUR HERSTELLUNG EINES AUF EINEM TRÄGERSUBSTRAT GEFORMTEN PIEZOELEKTRISCHEN FILTERS MIT EINEM AKUSTISCHEN RESONATOR AUF EINER AKUSTISCHEN REFLEKTORSCHICHT

摘要

A method of manufacturing a piezoelectric filter with a resonator comprising a layer of a piezoelectric material (1) which is provided with an electrode (2,3) on either side, which resonator is situated on an acoustic reflector layer (4) formed on a surface (6) of a carrier substrate (7). In the method, the layer of piezoelectric material (1) is provided on a surface (8) of an auxiliary substrate (9), after which a first electrode (2) is formed on the layer of piezoelectric material (1). The acoustic reflector layer (4) is provided on and next to the first electrode (2), and the structure thus formed is secured with the side facing away from the auxiliary substrate (9) on the carrier substrate (7). The auxiliary substrate (9) is removed and a second electrode (3) situated opposite the first electrode (2) is provided.