| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily perform the inspection related to whether a gas sensor element is a defective one. <P>SOLUTION: The sensor element has: the first electrode 117a, which is provided on the surface of a first solid electrolyte layer 116 and exposed to a gas to be measured through a porous part 118b; and the second electrode 115a, which is formed on the backside of the first solid electrolyte layer 116, provided on the surface of the first solid electrolyte layer 116 so as to be exposed to the inside of a measuring chamber 114a and exposed to the gas to be measured introduced into the measuring chamber 114a through a diffusion rate limiting layer 114b. A first inspection liquid 610 having conductivity is supplied to the porous part 118b so as to be brought into contact with at least the first solid electrolyte layer but not to be brought into contact with the diffusion rate limiting layer 114b, voltage is applied across the first electrode 117a and the second electrode 115a to detect the value of the current flowing across the first electrode 117a and the second electrode 115a, and the current value is compared with a first threshold T1 to determine whether insulation is ensured between the first electrode 117a and the second electrode 115a. <P>COPYRIGHT: (C)2009,JPO&INPIT |
