| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a body provided with a MFI type zeolite membrane capable of separating sulfur hexafluoride or carbon tetrafluoride from a gaseous mixture containing sulfur hexafluoride (SF<SB>6</SB>) or carbon tetrafluoride (CF<SB>4</SB>) by selectively permeating sulfur hexafluoride or carbon tetrafluoride through the MFI type zeolite membrane. <P>SOLUTION: The body provided with the MFI type zeolite membrane comprises a porous substrate, and the MFI type zeolite membrane provided on the surface of the porous substrate wherein the MFI type zeolite membrane has potassium in its skeleton, and the mole ratio of SiO<SB>2</SB>/Al<SB>2</SB>O<SB>3</SB>is 50-300. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
