| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate sensor that can be miniaturized, that ensures housing strength, that can alleviate the stress applied to its substrate, and moreover, that can reduce the number of components and the number of assembly steps. <P>SOLUTION: A fluid flow path 54 is formed in a base 43, and a part of the upper surface of the flow path 54 is opened to a substrate installation surface, on the upper surface of the base 43. A circuit substrate 67 is arranged on the substrate installation surface via an annular seal member 57. A boss 59 and a boss 61 are projected horizontally from the inner surface of a cover 42, and substrate holders 65, 66 for pressing the upper surface of the circuit substrate 67 are projected horizontally. The cover 42 is attached to the base 43 by press fitting of the bosses 59, 61 into press-fitting holes 60, 63 which are formed horizontally in the base 43, and the substrate holders 65, 66 press fit the circuit substrate 67 downward so as to crush the seal member 57. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
