| 摘要 |
PROBLEM TO BE SOLVED: To detect the misregistration between electrodes opposing to each other with a piezoelectric actuator therebetween in a piezoelectric actuator. SOLUTION: The piezoelectric actuator 32 is formed by laminating a diaphragm 40, a lower piezoelectric layer 41, an upper piezoelectric layer 42, a lower electrode 43, an intermediate electrode 44 and an upper electrode 45 on one another. When a scanning-wise misregistration develops between the upper electrode 45 and the intermediate electrode 44, the opposing area between an upper electrode 45a and the intermediate electrode 44 increases or decreases, while the opposing area between an upper electrode 45b and the intermediate electrode 44 increases or decreases on the contrary. By detecting the difference between the electrostatic capacity between the upper electrode 45a and the intermediate electrode 44 and that between the upper electrode 45b and the intermediate electrode 44, whether the scanning-wise misregistration develops between the upper electrode 45 and the intermediate electrode 44 or not is judged depending on whether the detected difference is larger than the predetermined amount or not and, at the same time, the amount of the misregistration is calculated from the value of the detected difference. COPYRIGHT: (C)2009,JPO&INPIT
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