发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A method of manufacturing a semiconductor device is provided which comprises: forming a first gate insulating film and a second gate insulating film in an active region of a semiconductor substrate; introducing an impurity of a first conductivity type into a first site where a first body region is to be formed, the first site being disposed under the first gate insulating film in the active region; forming a gate electrode on each of the first gate insulating film and the second gate insulating film; and introducing an impurity of the first conductivity type into the first site and a second site where a second body region is to be formed, the second site being disposed under the second gate insulating film in the active region, to form the first body region and the second body region, respectively.
申请公布号 US2009230469(A1) 申请公布日期 2009.09.17
申请号 US20090401007 申请日期 2009.03.10
申请人 FUJITSU MICROELECTRONICS LIMITED 发明人 SATO HIDEKAZU
分类号 H01L29/06;H01L21/71 主分类号 H01L29/06
代理机构 代理人
主权项
地址