| 发明名称 |
SUBSTRATE PROCESSING APPARATUS |
| 摘要 |
<p>A substrate processing apparatus is provided to improve yield by reducing the number of substrates to be scraped. A substrate processing apparatus(10) is installed by interposing an input/output device(16) and a network(12). A storage unit stores production information about a substrate generated in processing the substrate. A display part(18) displays a production history stored in the storage unit. A receiving part receives a plurality of selections of the production history. A control unit includes a substrate information conversion part which indicates information about a maintenance state of the substrate. A display control unit displays the information about the maintenance state of the substrate according to the production history.</p> |
| 申请公布号 |
KR20090098731(A) |
申请公布日期 |
2009.09.17 |
| 申请号 |
KR20090021495 |
申请日期 |
2009.03.13 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC. |
发明人 |
AKAO TOKUNOBU;YAMAMOTO KAZUYOSHI |
| 分类号 |
H01L21/00;H01L21/02 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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