A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.
申请公布号
WO2009076657(A3)
申请公布日期
2009.09.17
申请号
WO2008US86719
申请日期
2008.12.12
申请人
INTERMOLECULAR, INC.;WEINER, KURT;FRANCIS, AARON;WILLIAMS, KEN