发明名称 FUSE OF SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A fuse of a semiconductor device and a method for manufacturing the same are provided to prevent yield drop due to a repair error by varying the phase of crystalline and amorphous according to the magnitude of electric energy. A first metal line(210) is formed on the upper part of a semiconductor substrate(200). An interlayer dielectric(220) is formed on the first metal line. A second metal line is formed on the interlayer dielectric. A fuse(230) passes through the interlayer dielectric while connecting the first and the second metal line. The fuse is made from a phase change material such as GTS film which varies in phase when electric energy is applied to the first and the second metal line.
申请公布号 KR20090098287(A) 申请公布日期 2009.09.17
申请号 KR20080023553 申请日期 2008.03.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, SUK MIN
分类号 H01L23/62 主分类号 H01L23/62
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