发明名称 REGULATING DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a regulating device capable of stably regulating a temperature of a medium. <P>SOLUTION: This invention relates to the regulating device regulating a temperature T2 of a first medium in accordance with a target temperature thereof, comprising: a heat exchanger 16 which performs a heat exchange between the first medium and a second medium; a control valve 14 which controls a flow rate of the second medium flowing into the heat exchanger 16; temperature sensors 2, 4 which detect temperatures T1, T2 of the first medium; temperature sensors 6, 8 which detect temperatures Tw1, Tw2 of the second medium; and a heat quantity control unit 30 and a temperature control unit 50 which calculate a target exchange heat quantity in the heat exchanger 16 based on an output and a target temperature of the temperature sensor 2, and calculate an exchange heat quantity in the heat exchanger 16 based on outputs of the temperature sensors 6, 8 and the flow rate of the second medium, and add a signal dependent on a difference between the target exchange heat quantity and the exchange heat quantity to a signal dependent on a difference between an output of the temperature sensor 4 and the target temperature, and control the control valve 14 so that a difference between the output of the temperature sensor 4 and the target temperature may be reduced based on the signal obtained by the addition. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009212244(A) 申请公布日期 2009.09.17
申请号 JP20080052668 申请日期 2008.03.03
申请人 CANON INC 发明人 OKADA YOSHIYUKI
分类号 H01L21/027 主分类号 H01L21/027
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